Kaspar, Peter

ETH Zürich Peter Kaspar Institut f. Elektronik ETZ H 85 Gloriastrasse 35 8092 Zürich Phone: +41 44 632 40 22 E-Mail:

Peter Kaspar received his MSc. degree in physics from ETH Zurich in 2005. He carried out his master thesis at the Ultrafast Laser Physics Lab, studying high harmonic generation in noble gases using ultrashort laser pulses. In 2006 he joined the Communication Photonics Group at IfE, adding an active branch to the photonic crystals project together with Roman Kappeler. He works on the development of III/V semiconductor technology and on the optical characterization of nano-structured photonic devices.

Research Interests

• Optical waveguide theory
• Electromagnetic wave propagation in periodic media
• Semiconductor micro- and nanofabrication technology (EBL, RIE, PVD, PECVD, wet etching, etc.)
• Quantum well lasers
• Active photonic crystal devices
• Responsible for ICP-RIE machine in FIRST (2007 - 2011)

Publications

• P. Kaspar, R. Kappeler, D. Erni and H. Jäckel, "Relevance of the light line in planar photonic crystal waveguides with weak vertical confinement", Opt. Express 19 (24), 2011
• P. Kaspar, C. Fougner, R. Kappeler and H. Jäckel, "Limitations of Cl₂/O₂-based ICP-RIE of deep holes for planar photonic crystals in InP", Phys. Status Solidi C, 2011
• P. Kaspar, S. Holzapfel, E. J. Windhab and H. Jäckel, "Self-aligned mask renewal for anisotropically etched circular micro- and nanostructures", J. Micromech. Microeng. 21 (11), 2011
• R. Kappeler, P. Kaspar and H. Jäckel, "Loss-relevant structural imperfections in substrate-type photonic crystal waveguides ", J. Lightwave Technol. 29 (21), 2011.
• R. Kappeler, P. Kaspar and H. Jäckel, "Propagation loss computation of W1 photonic crystal waveguides using the cutback technique with the 3D-FDTD method", Phot. Nano. Fund. Appl. 9 (3), 2011.
• P. Ma, P. Kaspar, Y. Fedoryshyn, P. Strasser and H. Jäckel, "Compact inline resonant photonic crystal Fabry-Pérot cavities for TM-polarized light", IEEE Photon. Technol. Lett. 23 (4), 2011.
• P. Ma, P. Kaspar, P. Strasser and H. Jäckel, "Compact and integrated TM-pass photonic crystal waveguide polarizer in InGaAsP-InP", IEEE Photon. Technol. Lett. 22 (24), 2010.
• P. Kaspar, Y. Jeyaram, A. Foelske, R. Kötz and H. Jäckel: "Silicon nitride hardmask fabrication using a cyclic CHF₃-based reactive ion etching process for vertical profile nanostructures", J. Vac. Sci. Technol. B 28 (6), 2010
• P. Ma, P. Kaspar and H. Jackel: "Low-Loss photonic crystal defect waveguides and taper designs in InP/InGaAsP for transverse magnetic polarized light", Jpn. J. Appl. Phys. 49, 2010
• P. Kaspar, R. Kappeler, P. Friedli and H. Jäckel: "Air-bridge contact fabrication for in-plane active photonic crystal devices", 22nd International Conference on Indium Phosphide and Related Materials, p. 304-307, 2010
• Y. Fedoryshyn, M. Beck, P. Kaspar and H. Jaeckel: "Characterization of Si volume- and delta-doped InGaAs grown by molecular beam epitaxy", J. Appl. Phys. 107 (9), 2010
• P. Ma, P. Kaspar, Y. Fedoryshyn, P. Strasser and H. Jackel: "InP-based planar photonic crystal waveguide in honeycomb lattice geometry for TM-polarized light", Opt. Lett. 34 (10), 2009
• P. Kaspar, R. Kappeler, F. Karouta, F. Robin, P. Strasser and H. Jackel: "The impact of metallic contacts on propagation losses of an underlying photonic crystal waveguide", Proc. SPIE 7031, p. 70310A, 2008
• V. Callegari, P. Kaspar, P. Strasser, U. Sennhauser and H. Jackel: "Fabrication of 2D-InP photonic crystals by means of hole-etching using focused ion beam and characterization of the hole shape, damage and surface roughness induced by the fabrication process", Workshop FIB for Photonics, p.30, 2008
• F. Karouta, B. Docter, E. J. Geluk, P. Kaspar and M. K. Smit: "Three level masking for improved aspect ratio InP-based photonic crystals", 20th International Conference on Indium Phosphide and Related Materials, p.508, 2008
• F. Karouta, B. Docter, P. Kaspar, E. J. Geluk and M. K. Smit: "Very high aspect ratio of photonic crystals holes in InP", Symposium IEEE/LEOS Benelux Chapter, p.227, 2007

Supervised Student Projects

• Robert Blattmann: "On-Chip Laser Coupling into Membrane Photonic Crystal Waveguides", Semester Thesis, HS09
• Baran Eren: "Active Photonic Crystal Waveguides", Master Thesis, FS09
• Adrian Scherer: "Fabrication of Narrow Electrical Contacts on Patterned Nanostructures", Semester Thesis, HS08
• Peter Friedli: "Electrical Characterization of Contacts for Active Photonic Crystals", Master Thesis, FS08
• Yogesh Jeyaram: "Optimisation of the RIE and ICP Etching Process", Semester Thesis, FS08
• Diego Marti: "Electrical Contacts for Active Photonic Crystal Devices", Semester Thesis, FS07

Links

• Communication Photonics Group
• FIRST Laboratory